Semiconductor equipment consumables & spare parts
Lubanix is a semiconductor equipment spare parts and wafer fab consumables supplier. We provide silicon electrodes, Focus Rings, Edge Rings, ceramic / alumina parts, quartz, ESC / heaters and replacement parts for LAM Research, Applied Materials and Tokyo Electron equipment. Search by part number, description or equipment, or request a substitute.
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Structured by component family. Select a category to see matching parts.
Monocrystalline silicon electrodes and Focus, Edge and Shield Rings for 8–12-inch platforms.
High-purity alumina tubes, nozzles, insulators and other ceramic components.
Quartz tubes, sapphire tubes and process-chamber components.
Metal plates, arc-chamber components, seals and structural hardware.
Electrostatic chucks and 300 mm heaters; new and refurbished options where available.
Insulators, isolation components and focus rings for AMAT, LAM and TEL etch tools.
Imported OEM spare parts and consumables for mainstream wafer-fab equipment.
CORE PARTS & CAPABILITIES
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Find semiconductor parts by part number
Search by OEM part number, drawing number, component name or equipment family. Lubanix lists replacement parts and wafer-fab consumables for LAM Research, Applied Materials (AMAT) and Tokyo Electron (TEL) tools. Send us a part number, photo or drawing to confirm compatibility and request a quotation.